These (and some others) are all quite similar raspy sounds to most ears and by features other than place of articulation:
[χ]unvoiced uvular fricative
[x]unvoiced velar fricative
[ç]unvoiced palatal fricative
And in fact in many languages two of these are merely reflexes of a single phoneme. Sometimes all three are reflexes of the same phoneme, other times another sound may also be a reflex of the same phoneme.
But I'm unable to think of any language in which any two of
/ç/ are separate even at the phoneme level.
Are there languages which have two, or all three, of these as separate phonemes?
[χ]when pronounced in the Spanish of that area:
[xiˈχõ̞ɴ]. (But compare Asturian
[ʃiˈʃõŋ].) However, those are just allophones that occur to phonemic
/x/due to regressive assimilation from the vowel following. Chilean Spanish can have
/x/, in some positions, too. But none of these have minimal pairs, because they are not phonemic.